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전기식 칠러(model : LC-9090HSC)
Dynamic Temp. Control (Switching & Mixing Mode 사용)
  • . Temp. Ramping Up & Down Time 단축
  • . 다양한 제어 Mode 구현 (Step형 다단제어 , 전극 제어, Return / Supply 제어)
LC-9090HSC graph
SPECIFICATION
Process ETCH
이미지 LC-9090HSC
Chiller Model LC-9090HSC
Operating Range 20˚C ~ 80℃
Temp. Control Accuracy ±2℃
Cooling Capacity 9,000W @50℃
Reservoir Tank 13Liter
Flow Rate 30LPM @4㎏/㎠
Process Fluid FC-3283
Interface RS-485
Footprint W450×D800×H850
Electrical 208-220V, 3PH 4Wire 400A
PCW 65±2.5LPM @18℃
Weight 290㎏
 
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