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전기식 칠러(model : LC-10KEC)
  • Low Temp, high Power 대응 Chiller
  • Compact Size 구현
LC-10KEC graph
SPECIFICATION
Process ETCH
이미지 LC-10KEC
Chiller Model LC-10KEC
Operating Range -20˚C ~ 70℃
Temp. Control Accuracy ±0.5℃
Cooling Capacity 14,200W @20℃
Reservoir Tank 9.5Liter
Flow Rate 30LPM @0.5Mpa
Process Fluid FC-3283
Interface DI/O
Footprint W470×D440×H750
Electrical 200-220VAC, 50/60㎐, 3Phase 4Wire, 70A
PCW 18±0.5℃, 50LPM(0.3Mpa)
Weight 105㎏
 
ISO 9001:2000 벤처기업/Inno-biz