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Protection(Pneumatic) Auto Valve
Protection(Pneumatic) Auto Valve Additional safety device. The equipment is installed on the foreline connected to main chamber and vacuum pump in semiconductor manufacturing line. When there is failure in chamber or pump, this device blocks the foreline, preventing malfunction of other equipment and protecting valves from vacuum and powder when replacement or repair is taking place.
SPECIFICATION
Item Protection
He leak Rate Sealing : < × 10 -8 Torr Liter/sec
Pressure Range 1 × 10 - 9 Torr to 1.6 bar
Operating Temp ≤ 200℃
Materials Body SUS 304 [EP & Glass Sanding]
Mechanism SUS 304 [EP]
Gate sealing O-ring [Viton]
Response Time Open-Close : 0.3 ~ 0.5sec
Weight MK100:13㎏ , MF125:17㎏ , MF160:24㎏
Position Indicating LED Display by Magnet Sensor
 
ISO 9001:2000 Venture Business/Inno-biz