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Metal / Imp / CVD
  • Eco-friendly and noiseless because of Thermoelement (Non Gas)
  • ±0.1℃ precision. Improves manufacturing process by ±0.1℃ control
  • Precise flow control through inverter control
  • Improved durability and reliability due to certified parts
SPECIFICATION
Process Metal Implant CVD
이미지 Metal용 Implant용 CVD용
Chiller Model LC-90EXC-DI LC-20EC-IMP LC-40EC
Operating Range +5 ~ +80℃ +5 ~ +60℃ -10˚C ~ 60℃
Temp. Control Accuracy ±0.1℃ ±0.5℃ ±0.1℃
Cooling Capacity 9000W @20℃ 2000W @20℃ 4000W @20℃
Reservoir Tank 20Liter 8.5Liter 5Liter
Flow Rate 30LPM @4㎏/㎠ 15LPM @4㎏/㎠ 20 LPM @0.5Mpa
Process Fluid D.i WATER D.i WATER FC-3283
Interface RS-232 DI/O User Specification
Footprint W600×D900×H1300 W600×D900×H1300 W635×D635×H254
Electrical 208-220V ,75A, 3PH 208-220V ,20A, 3PH 200-220V , 20A , 3PH
PCW 30LPM @18℃ 15LPM @18℃ 15LPM @18℃
Weight 250㎏ 200㎏ 50㎏
 
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