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ETCH
characteristics refrigeration LICO-Ⅰ LICO-Ⅱ
image 냉동 LICO-Ⅰ LICO-Ⅱ
Install Location Lower Floor FAB Grid Beam on the Lower Side of Grating Upper Side of Grating, Near the Main Equipment Chamber
Pipe Length 15M 5M 1.5M
Control Speed(FTT) 60SEC 28SEC 15SEC
Power Consumption 10.4kwh 2.5kwh 2.1kwh
The strong points of LICO
  • Controlling Speed
    • Fast responsiveness, improved precision and temperature control speed (FTT, LTT) by located near main equipment chamber with lowest possible pipe length.
  • Energy saving
    • Reduce 80% of consumption of electrical power compare to existing refrigeration Chiller production
  • Green FAB
    • Providing eco-friendly use by using Thermo Electronic Module that refrigerant gas is not necessary
  • Compact size
    • It is structure that is alternative walk plate that is installed in Empty place in Main equipment and materialize the Small Footprint by differentiate between Unit and Remote Controller
SPECIFICATION
Process ETCH
Chiller Model LC-40EC LC-60EC LC-80EC LC-90EXC LC-8050XC
Channel Single Single Single Single Dual
Temp Range -20℃~60℃ -20℃~60℃ -20℃~60℃ -20℃~80℃ Cool Hot
-10℃~60℃ 30℃~90℃
Cooling Capacity 4,000W ~20℃ 6,000W @20℃ 8,000W @20℃ 8,000W @20℃ 8,000W @20℃ 5,000W @20℃
Accuracy ±0.1 ℃
Flow rate 20LPM @4㎏/㎠ 30LPM @4㎏/㎠ 20 LPM @3㎏/㎠
Coolant FC-3283
Interface Analog, RS-232, RS-442, RS-485 , D-net
Size W265 × D850 × H270 W600 × D520 × H400 W480 × D762 × H415 W450 × D710 × H550 W370 × D650 × H870
Weight 50㎏ 88㎏ 100㎏ 100㎏ 150㎏
PCW 20LPM @18℃ 25LPM @18℃ 30±1.5LPM @18℃ 30 LPM @18℃ 50LPM @18℃
Electrical 208-220V,100A, 3PH 208-220V ,175A, 3PH 208-220V ,225A, 3PH 208-220V ,300A, 3PH 208-220V , 100A, 3PH
Application Tool's ETCH(OXIDE, POLY), AMAT ETCH(OXIDE, POLY), LRC, DMS, MATTSON ETCH(OXIDE, POLY), TEL, AMAT, SEMES, LAM ETCH(OXIDE, POLY), TEL,SEMES ETCH(OXIDE,POLY), LAM
 
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